Structural, electrical and optical properties of ITO films with a thin TiO2 seed layer prepared by RF magnetron sputtering

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Bibliographic Details
Published inVacuum Vol. 83; no. 8; pp. 1091 - 1094
Main Authors Song, Shumei, Yang, Tianlin, Li, Yanhui, Pang, ZhiYong, Lin, Liang, Lv, Maoshui, Han, Shenghao
Format Journal Article
LanguageEnglish
Published 01.05.2009
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2009.01.003