Electrical and Recombination Properties of Copper‐Silicide Precipitates in Silicon
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Published in | Journal of the Electrochemical Society Vol. 145; no. 11; pp. 3889 - 3898 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.11.1998
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Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.1838889 |