Surface sulfurization of liner and ruthenium metallization to reduce interface scattering for Low-Resistance interconnect

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Bibliographic Details
Published inApplied surface science Vol. 652; p. 159318
Main Authors Chen, Yu-Lin, Hsiao, Kai-Yuan, Lu, Ming-Yen, Yuin Keng, Pei, Chang, Shou-Yi
Format Journal Article
LanguageEnglish
Published 15.04.2024
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ISSN:0169-4332
DOI:10.1016/j.apsusc.2024.159318