Electrical and optical properties of Co+ ion implanted a-Si1−xCx:H alloys
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Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 160; no. 4; pp. 505 - 509 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.04.2000
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Online Access | Get full text |
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ISSN: | 0168-583X |
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DOI: | 10.1016/S0168-583X(99)00630-8 |