Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses

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Bibliographic Details
Published inVacuum Vol. 83; no. 2; pp. 366 - 371
Main Authors Xiao, Qi-Ling, Xu, Cheng, Shao, Shu-Ying, Shao, Jian-Da, Fan, Zheng-Xiu
Format Journal Article
LanguageEnglish
Published 26.09.2008
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2008.05.031