Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses
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Published in | Vacuum Vol. 83; no. 2; pp. 366 - 371 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
26.09.2008
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Online Access | Get full text |
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ISSN: | 0042-207X |
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DOI: | 10.1016/j.vacuum.2008.05.031 |