p–n junctions formed by BF2 ion implantation and laser annealing

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Bibliographic Details
Published inSolid-state electronics Vol. 43; no. 3; pp. 487 - 492
Main Author Tsukamoto, Hironori
Format Journal Article
LanguageEnglish
Published 01.03.1999
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ISSN:0038-1101
DOI:10.1016/S0038-1101(98)00319-0