Thick film pressure transducers

Flexible plastic membranes with thick film components printed on them can be used to produce inexpensive miniature pressure transducers. Two methods of sensing diaphragm movement were investigated. Firstly, carbon polymer resistors were printed onto the membrane and resistance changes due to the pie...

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Bibliographic Details
Published inMicroelectronics Vol. 17; no. 1; pp. 35 - 41
Main Authors Flore, A. Di, Haskard, M.R.
Format Journal Article
LanguageEnglish
Published London Elsevier Ltd 01.01.1986
Mackintosh
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
Manometry
Thick film
Capacitive transducer
Membrane
Miniaturization
Resistive transducer
Pressure sensor
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Summary:Flexible plastic membranes with thick film components printed on them can be used to produce inexpensive miniature pressure transducers. Two methods of sensing diaphragm movement were investigated. Firstly, carbon polymer resistors were printed onto the membrane and resistance changes due to the piezo resistance effect noted. Secondly, a conductive plate was printed onto the membrane to form one plate of a capacitor. Any movement due to pressure was detected as a capacitive changes. Both systems had integrated hybrid electronics to give a digital output proportional to pressure. The final prototype units investigated had diaphragms 4mm in diameter and were linear up to pressures of 20 kPa.
ISSN:1879-2391
0026-2692
1879-2391
DOI:10.1016/S0026-2692(86)80101-X