An industrial perspective of technology CAD for advanced CMOS technologies

Technology CAD (TCAD) has grown in both sophistication and maturity and is now an essential engineering tool for new technology development in industrial environments. The use of TCAD for reduced development cost and cycle-time, for design model generation, for an improved physical understanding of...

Full description

Saved in:
Bibliographic Details
Published inMicroelectronic engineering Vol. 34; no. 1; pp. 65 - 66
Main Author Bold, B.S.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 01.12.1996
Elsevier Science
Subjects
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Microelectronic fabrication
Perspective
Simulation
Complementary MOS technology
Computer aided design
Integrated circuit
Online AccessGet full text

Cover

More Information
Summary:Technology CAD (TCAD) has grown in both sophistication and maturity and is now an essential engineering tool for new technology development in industrial environments. The use of TCAD for reduced development cost and cycle-time, for design model generation, for an improved physical understanding of device operation and for process boundary and sensitivity analysis was discussed, with reference to industrial processes at 0.5 μm and 0.35 μm.
ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(96)00023-8