Micro-Hole Diameter Inspection Using Audible Sound

• Published in: Key Engineering Materials Vol. 656-657; pp. 755 - 760
• Main Authors: Nagasu, Yoshinori, Oguchi, Keigo, Nakayama, Noboru, Otani, Makoto, Eguchi, Kakumasa, Itoh, Kazunori
• Format: Journal Article
• Language: English
• Published: Zurich Trans Tech Publications Ltd 23.07.2015
• Subjects: Fluid dynamics; Fluid flow; Fluids; Fuel injection; Gas sensors; Inspection; Sound; Sound filters; Inspection System; Audible Sound; Micro-Holes; Guarantee the Performance

This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, micro...