Micro-Hole Diameter Inspection Using Audible Sound

This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, micro...

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Bibliographic Details
Published inKey Engineering Materials Vol. 656-657; pp. 755 - 760
Main Authors Nagasu, Yoshinori, Oguchi, Keigo, Nakayama, Noboru, Otani, Makoto, Eguchi, Kakumasa, Itoh, Kazunori
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 23.07.2015
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