Micro-Hole Diameter Inspection Using Audible Sound
This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, micro...
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Published in | Key Engineering Materials Vol. 656-657; pp. 755 - 760 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Zurich
Trans Tech Publications Ltd
23.07.2015
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Subjects | |
Online Access | Get full text |
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Summary: | This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, microphone filters and fuel injection plates. Therefore, if the flow rate of fluid passing through micro-holes is accurately assessed by an inspection system, the performance of a product can be guaranteed. |
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Bibliography: | Selected, peer reviewed papers from the 2014 International Conference on Machining, Materials and Mechanical Technologies (IC3MT), August 31- September 5, 2014, Taipei City, Taiwan ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISBN: | 3038354953 9783038354956 |
ISSN: | 1013-9826 1662-9795 1662-9795 |
DOI: | 10.4028/www.scientific.net/KEM.656-657.755 |