Micro-Hole Diameter Inspection Using Audible Sound

This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, micro...

Full description

Saved in:
Bibliographic Details
Published inKey Engineering Materials Vol. 656-657; pp. 755 - 760
Main Authors Nagasu, Yoshinori, Oguchi, Keigo, Nakayama, Noboru, Otani, Makoto, Eguchi, Kakumasa, Itoh, Kazunori
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 23.07.2015
Subjects
Fluid dynamics
Fluid flow
Fluids
Fuel injection
Gas sensors
Inspection
Sound
Sound filters
Inspection System
Audible Sound
Micro-Holes
Guarantee the Performance
Online AccessGet full text

Cover

More Information
Summary:This paper presents a method for inspecting micro-holes with diameters of less than 100 μm using audible sound. The inspection system measures the micro-hole diameter by comparing two sound signals. Fluid flow through micro-holes affects the performance of products such as CO gas sensor parts, microphone filters and fuel injection plates. Therefore, if the flow rate of fluid passing through micro-holes is accurately assessed by an inspection system, the performance of a product can be guaranteed.
Bibliography:Selected, peer reviewed papers from the 2014 International Conference on Machining, Materials and Mechanical Technologies (IC3MT), August 31- September 5, 2014, Taipei City, Taiwan
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISBN:3038354953
9783038354956
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.656-657.755