Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

Saved in:

Bibliographic Details
Published in	Thin solid films Vol. 86; no. 4; pp. 359 - 367
Main Authors	Augelli, V., Murri, R., Schiavulli, L., Bruno, G., Capezzuto, P., Cramarossa, F., Evangelisti, F., Fortunato, G.
Format	Journal Article
Language	English
Published	18.12.1981
Online Access	Get full text

Loading…

Be the first to leave a comment!