Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

Saved in:
Bibliographic Details
Published inThin solid films Vol. 86; no. 4; pp. 359 - 367
Main Authors Augelli, V., Murri, R., Schiavulli, L., Bruno, G., Capezzuto, P., Cramarossa, F., Evangelisti, F., Fortunato, G.
Format Journal Article
LanguageEnglish
Published 18.12.1981
Online AccessGet full text

Cover

More Information
ISSN:0040-6090
DOI:10.1016/0040-6090(81)90344-8