Transformation of SiSiO2Al structures under RF-plasma treatment
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Published in | Applied surface science Vol. 39; no. 1-4; pp. 388 - 391 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
01.10.1989
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Online Access | Get full text |
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ISSN: | 0169-4332 |
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DOI: | 10.1016/0169-4332(89)90455-8 |