Characteristics and radiation effects of MOS capacitors with Al2O3 layers in p-type silicon
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Published in | Applied radiation and isotopes Vol. 46; no. 5; pp. 355 - 361 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
01.05.1995
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Online Access | Get full text |
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ISSN: | 0969-8043 |
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DOI: | 10.1016/0969-8043(94)00141-L |