Micro-arc method for the synthesis of silicon nanostructures

Abstract This paper presents the results of plasma synthesis of silicon nanostructures in an air-argon medium. The synthesis of silicon nanostructures was carried out in a vacuum chamber at a gas mixture pressure of 500 Torr, with partial pressures of argon and air in the ratio of 4:1. Molybdenum an...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1870; no. 1; p. 12012
Main Authors Kaleeva, A. A., Timerkaev, B. A., Shamsutdinov, R. S., Saifutdinova, A. A., Shakirov, B. R.
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.04.2021
Subjects
Argon
Electron microscopes
Gas mixtures
Microscopes
Nanostructure
Nanotubes
Physics
Silicon
Synthesis
Vacuum chambers
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Summary:Abstract This paper presents the results of plasma synthesis of silicon nanostructures in an air-argon medium. The synthesis of silicon nanostructures was carried out in a vacuum chamber at a gas mixture pressure of 500 Torr, with partial pressures of argon and air in the ratio of 4:1. Molybdenum and silicon embedded in a copper tube were used as electrodes. Current and voltage were maintained in the range of 8-25 A and 30-50 V, corresponding. As a result of experiments, silicon nanostructures were deposited on the surface of the electrodes. Nanostructures were studied by optical and electron microscopes. Forms of silicon nanostructures were mainly in the form of nanotubes. Their diameters range from 200 nm to 500 nm, and their length reaches 1 mm. On the surface of these nanotubes, nanovilli with a diameter of about 5 nm and a length of 100 nm are observed.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1870/1/012012