An amperometric microsensor array with 1024 individually addressable elements for two-dimensional concentration mapping

Microsensor arrays with 1024 individually addressable amperometric cells are presented. The arrays have been realized in silicon planar technology on 10 mm×10 mm and 30 mm×30 mm substrates with separated hydrogel membranes. The single sensor cell behaviour as well as the behaviour of the complete ar...

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 24; no. 1; pp. 300 - 303
Main Authors Hinkers, H., Hermes, T., Sundermeier, C., Borchardt, M., Dumschat, C., Bücher, S., Bühner, M., Cammann, K., Knoll, M.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier B.V 1995
Amsterdam Elsevier
New York, NY
Subjects
Amperometric sensors
Analytical chemistry
Chemistry
Concentration mapping
Exact sciences and technology
General, instrumentation
Microsensor array
Amperometric sensors
Microsensor array
Concentration mapping
Microelectronic fabrication
Oxygen
Multiplexer
Amperometry
Standard curve
Microelectrode
Silicon
Chemical sensor
Sensor array
Wafer
Concentration distribution
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Summary:Microsensor arrays with 1024 individually addressable amperometric cells are presented. The arrays have been realized in silicon planar technology on 10 mm×10 mm and 30 mm×30 mm substrates with separated hydrogel membranes. The single sensor cell behaviour as well as the behaviour of the complete array have been investigated. To demonstrate the performance of the devices, a two-dimensional oxygen concentration mapping is presented.
ISSN:0925-4005
1873-3077
DOI:10.1016/0925-4005(95)85065-1