Structural and mechanical properties of TaN/a-CNx multilayer films

TaN/a-CNx multilayer films with modulation periods of 8.5-12nm are deposited on Si wafers and titanium alloy substrate using direct current magnetron sputtering. The morphology and structure of the films are characterized by scanning electron microscopy, X-ray diffraction and transmission electron m...

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Published inSurface & coatings technology Vol. 206; no. 8-9; pp. 2242 - 2248
Main Authors CHEN, R, TUA, J. P, LIU, D. G, YU, Y. L, QU, S. X, GU, C. D
Format Journal Article
LanguageEnglish
Published Amsterdam Elsevier 15.01.2012
Subjects
Applied sciences
Columnar structure
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Friction
Hardness
Magnetron sputtering
Materials science
Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology
Metals. Metallurgy
Methods of deposition of films and coatings; film growth and epitaxy
Multilayers
Nanostructure
Physics
Scanning electron microscopy
Silicon substrates
Surface treatments
Thin films
Multilayers
Multilayer
Tantalum nitride
Mechanical properties
Tribological property
Surface treatments
Microstructure
Columnar structure
Tribology
Carbon nitride
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Summary:TaN/a-CNx multilayer films with modulation periods of 8.5-12nm are deposited on Si wafers and titanium alloy substrate using direct current magnetron sputtering. The morphology and structure of the films are characterized by scanning electron microscopy, X-ray diffraction and transmission electron microscopy. Mechanical and tribological properties are tested by nanoindention and ball-on-disk tribometer. Columnar structure exists in single TaN film and TaN/a-CNx multilayer with 0.5nm-CNx, while the columnar crystalline can be better interrupted by thicker a-CNx layers. The hardness of all the TaN/a-CNx multilayers is higher than that of the single TaN film. The maximum hardness of 31.0GPa and the friction coefficient of 0.12 are obtained in the multilayer film with 2nm-CNx. According to our research, the thickness of a-CNx in multilayer is best to distribute within 1-2nm. The wear rates under 5N are in the order of 10-15m3m-1N-1for the multilayer films and increased by 1 order of magnitude 10-14for the TaN film (1.610-14m3m-1Na degree 1).
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2011.09.072