Enhancing overall performances of Cu/Ag/AZO multilayer films for transparent heaters via laser/furnace step-by-step annealing mode

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Bibliographic Details
Published inMaterials science in semiconductor processing Vol. 170; p. 107956
Main Authors Li, Bao-jia, Wang, Lin, Zhang, Hui-min, Wang, Zi-yan, Ruan, Jia-jun, Huang, Li-jing
Format Journal Article
LanguageEnglish
Published 01.02.2024
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ISSN:1369-8001
DOI:10.1016/j.mssp.2023.107956