Dissociative scattering of low-energy SiF3+ and SiF+ ions (5–200 eV) on Cu(100) surface

Saved in:
Bibliographic Details
Published inApplied surface science Vol. 100-101; pp. 333 - 337
Main Authors Yamamoto, Hiroyuki, Baba, Yuji, Sasaki, Teikichi A.
Format Journal Article
LanguageEnglish
Published 01.07.1996
Online AccessGet full text

Cover

More Information
ISSN:0169-4332
DOI:10.1016/0169-4332(96)00236-X