Etching of sapphire assisted by copper-vapour laser radiation
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Published in | Quantum electronics (Woodbury, N.Y.) Vol. 26; no. 1; pp. 65 - 68 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
31.01.1996
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Online Access | Get full text |
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ISSN: | 1063-7818 1468-4799 |
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DOI: | 10.1070/QE1996v026n01ABEH000590 |