Limiting Aspect Ratio of Diamond Microstructure Fabricated by Model Copy Technology
Model copy technology is an ideal approach for diamond patterning. However, incomplete filling were discovered in some of the diamond microstructures which were produced by model copy method. The effect of structural aspect ratio on the filling was investigated. The growth form of CVD diamond in the...
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Published in | Integrated ferroelectrics Vol. 137; no. 1; pp. 156 - 164 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Philadelphia
Taylor & Francis Group
01.01.2012
Taylor & Francis Ltd |
Subjects | |
Online Access | Get full text |
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Summary: | Model copy technology is an ideal approach for diamond patterning. However, incomplete filling were discovered in some of the diamond microstructures which were produced by model copy method. The effect of structural aspect ratio on the filling was investigated. The growth form of CVD diamond in the micro mould was analyzed. Results show that the nonuniformity of gas velocity distribution in the mould is the main course of incomplete filling, and an aspect ratio larger than 0.5 is necessary to achieve a complete filling. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1058-4587 1607-8489 |
DOI: | 10.1080/10584587.2012.687328 |