Limiting Aspect Ratio of Diamond Microstructure Fabricated by Model Copy Technology

Model copy technology is an ideal approach for diamond patterning. However, incomplete filling were discovered in some of the diamond microstructures which were produced by model copy method. The effect of structural aspect ratio on the filling was investigated. The growth form of CVD diamond in the...

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Published inIntegrated ferroelectrics Vol. 137; no. 1; pp. 156 - 164
Main Authors Wenzhuang, Lu, Yansong, Zhu, Jiajing, Yuan, Liangjie, Zhu, Hongjun, Wang, Dunwen, Zuo, Feng, Xu
Format Journal Article
LanguageEnglish
Published Philadelphia Taylor & Francis Group 01.01.2012
Taylor & Francis Ltd
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Summary:Model copy technology is an ideal approach for diamond patterning. However, incomplete filling were discovered in some of the diamond microstructures which were produced by model copy method. The effect of structural aspect ratio on the filling was investigated. The growth form of CVD diamond in the micro mould was analyzed. Results show that the nonuniformity of gas velocity distribution in the mould is the main course of incomplete filling, and an aspect ratio larger than 0.5 is necessary to achieve a complete filling.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1058-4587
1607-8489
DOI:10.1080/10584587.2012.687328