High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation

• Published in: Shanghai jiao tong da xue xue bao Vol. 28; no. 2; pp. 197 - 206
• Main Authors: Jiao, Ding, Ni, Zao, Wang, Jiachou, Li, Xinxin
• Format: Journal Article
• Language: English
• Published: Shanghai Shanghai Jiaotong University Press 01.04.2023; Springer Nature B.V; State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China%School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100049,China
• Subjects: Accelerometers; Architecture; Cantilever bridges; Cantilevers; Computer Science; Damping; Electrical Engineering; Engineering; Life Sciences; Materials Science; Micromachining; Modulation; Nonlinear systems; Original Paper; Resonant frequencies; Sensitivity; Silicon; Stress concentration; Wheatstone bridges; micromachining; 悬臂梁; 微机械; A; 压膜阻尼; cantilever; 加速度计; squeeze-film damping; 压阻效应; accelerometer; piezoresistance; TN 389

This study proposes a novel design and micromachining process for a dual-cantilever accelerometer. Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping, thus effectively optimizing the response frequency bandwidth. Owing to the high stress...