Stepwise Actuation of an Electrostatic Bimorph Cantilever Actuator Using a Patterned Bottom Electrode

• Published in: Journal of microelectromechanical systems Vol. 25; no. 5; pp. 909 - 915
• Main Authors: Lim, Keun-Seo, Yoon, Jun-Bo
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.10.2016; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: bimorph cantilever; Electrodes; Electrostatic actuators; electrostatic bimorph actuator; Electrostatics; Force; Microelectromechanical systems; Microelectromechanical systems (MEMS); Steady-state; stepwise actuation
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2016.2582522

The electrostatic actuation method has not been used widely in bimorph cantilevers despite its advantage of large displacement and low power consumption, mostly owing to the fact that it is limited to just two stable positions: 1) initial curled; and 2) final flat positions. In this paper, we first demonstrate a bimorph cantilever actuator having multiple steady-state positions in between those two boundary positions, accomplished by simply dividing the bottom electrode. We found that the number of steady-state positions and the steady-state tip heights can be controlled by the design of the bottom electrode. In our test experiment, the steady-state bimorph cantilever tip heights were 48 μm at 0 V, 28 μm at 21 V, 7 μm at 25 V, and 0 μm (flat) at 29 V, respectively. In order to relieve low reliability of the electrostatic bimorph cantilever, we devised non-contact actuation method and demonstrated that the lifetime of the electrostatic bimorph actuator greatly increased. This paper will pave the way to utilize bimorph cantilever actuators with greater versatility.