Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment

The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac) 2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs ener...

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Bibliographic Details
Published inRussian journal of inorganic chemistry Vol. 67; no. 12; pp. 1956 - 1961
Main Authors Shestakov, V. A., Yakovkina, L. V., Kichay, V. N.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.12.2022
Springer Nature B.V
Subjects
Argon
Chemical vapor deposition
Chemistry
Chemistry and Materials Science
Inorganic Chemistry
Modelling
Oxygen
Solid state devices
Synthesis
Synthesis and Properties of Inorganic Compounds
Thermodynamic equilibrium
Thermodynamic models
Thermodynamics
Vanadium dioxide
vanadium dioxide
thermodynamic modeling
CVD process
thin films
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Summary:The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac) 2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.
ISSN:0036-0236
1531-8613
DOI:10.1134/S0036023622601179