Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

Abstract We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specul...

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Published inJournal of physics. Conference series Vol. 2015; no. 1; pp. 12149 - 12152
Main Authors Spettel, J, Stocker, G, Dao, T D, Jannesari, R, Tortschanoff, A, Saeidi, P, Pühringer, G, Dubois, F, Fleury, C, Consani, C, Grille, T, Aschauer, E, Moridi, M, Jakoby, B
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.2021
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Summary:Abstract We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2015/1/012149