Design and analysis of a vertically moving voice coil motor with gravity compensation for semiconductor equipment
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| Published in | Sensors and actuators. A. Physical. Vol. 344; p. 113735 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.09.2022
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| Online Access | Get full text |
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| ISSN: | 0924-4247 |
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| DOI: | 10.1016/j.sna.2022.113735 |