Influence of polar groups and metal salts on the residual currents of semiconductor devices covered with polyimides

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 134; no. 4; pp. 975 - 978
Main Authors YOKOYAMA, T, KINJO, N, WAKASHIMA, Y
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.04.1987
Subjects
Applied sciences
Electronics
Exact sciences and technology
Other techniques and industries
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
Field effect transistor
Polyimide
Salt
Polarity
Metal
Coatings
Functional group
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2100607