A simple way to obtain backscattered electron images in a scanning transmission electron microscope

We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electr...

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Bibliographic Details
Published inMicroscopy Vol. 63; no. 4; p. 333
Main Authors Tsuruta, Hiroki, Tanaka, Shigeyasu, Tanji, Takayoshi, Morita, Chiaki
Format Journal Article
LanguageEnglish
Published England 01.08.2014
Subjects
backscattered electron
BSE
detector
STEM
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Summary:We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM.
ISSN:2050-5701
DOI:10.1093/jmicro/dfu017