A simple way to obtain backscattered electron images in a scanning transmission electron microscope
We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electr...
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Published in | Microscopy Vol. 63; no. 4; p. 333 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
England
01.08.2014
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Subjects | |
Online Access | Get more information |
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Summary: | We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM. |
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ISSN: | 2050-5701 |
DOI: | 10.1093/jmicro/dfu017 |