Design and Characterization of Four-Degree-of-Freedom Fast Steering Mirror for Laser Compensation System

The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser q...

Full description

Saved in:
Bibliographic Details
Published inIEEE transactions on industry applications Vol. 60; no. 3; pp. 3850 - 3859
Main Authors Liu, Chien-Sheng, Jiang, Kun-Cheng, Chen, Ming-Fu, Lin, Po-Ming
Format Journal Article
LanguageEnglish
Published New York IEEE 01.05.2024
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Closed loops
Coils
Compensation
Degrees of freedom
Disturbances
Electromagnetics
Fast steering mirror
Feedback control
Finite element method
laser compensation system
laser disturbances
Laser stability
Lasers
Magnetic flux
Mirrors
Prisms
Proportional integral derivative
Semiconductor lasers
Steering
voice coil motor
Online AccessGet full text

Cover

More Information
Summary:The accuracy and stability of laser are influenced not only by external environmental factors but also by the laser internal structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) laser disturbances. In this study, to reduce the laser disturbances and improve laser quality, a 4-DOF fast steering mirror (FSM) with double Porro prisms, which is driven by a voice coil motor (VCM), was designed for a laser compensation system. The 4-DOF FSM addressed the limitations of commercial laser compensation systems by achieving a shorter optical path length, reducing the number of components, and simplifying the setup of laser compensation systems at various positions. Furthermore, it enhanced the static and dynamic performance of a 4-DOF FSM proposed in a previous study. Finite element analysis was conducted to analyze both the electromagnetic structure and mechanical structure of the proposed 4-DOF FSM. Furthermore, a mathematical model was established for its motion dynamics, ensuring that its static and dynamic performance satisfied the conditions of compensating laser disturbances. Finally, a PID closed-loop control was established for the 4-DOF FSM laser compensation system. By comparing the differences before and after laser compensation using the 4-DOF FSM, the compensatory function of the 4-DOF laser compensation system was validated, achieving real-time compensation for laser disturbances.
ISSN:0093-9994
1939-9367
DOI:10.1109/TIA.2024.3360028