Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion

• Published in: Mechanism and machine theory Vol. 167; p. 104527
• Main Authors: Chen, Xigang, Li, Yangmin, Xie, Yanlin, Wang, Ruobing
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.01.2022
• Subjects: Decoupled XYZθ stage; Flexure mechanism design; Large-scale high precision motion; Two-stage amplifier; Ultra compact structure; Two-stage amplifier; Flexure mechanism design; Decoupled XYZθ stage; Ultra compact structure; Large-scale high precision motion
• ISSN: 0094-114X; 1873-3999
• DOI: 10.1016/j.mechmachtheory.2021.104527

A new high precision ultra-compact decoupled XYZθ motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial–parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZθ four axes output displacement. The function of serial–parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZθ four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZθ stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives. •New ultra-compact XYZθ micromotion stage based on flexure hinges.•Kinetostatic analysis model of this proposed stage is established.•Prototype fabrication and experimental verification.