Comparison between the electrical properties of atomic layer deposited thin ZrO2 films processed from cyclopentadienyl precursors

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Bibliographic Details
Published inMicroelectronic engineering Vol. 86; no. 7-9; pp. 1689 - 1691
Main Authors Dueñas, Salvador, Castán, Helena, García, Héctor, Gómez, Alfonso, Bailón, Luis, Kukli, Kaupo, Niinistö, Jaakko, Ritala, Mikko, Leskelä, Markku
Format Journal Article
LanguageEnglish
Published 01.07.2009
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ISSN:0167-9317
DOI:10.1016/j.mee.2009.03.103