Generation of strong magnetic field using 60 mm∅ superconducting bulk magnet and its application to magnetron sputtering device
To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these re...
Saved in:
Published in | Physica. C, Superconductivity Vol. 426; pp. 764 - 769 |
---|---|
Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.10.2005
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a
working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these requirements, we have designed a
portable and
user-friendly magnet system consisting of a small air-cooled type refrigerator and a bulk superconductor. By using the stress-controlling magnetization technique, we could achieve a magnetic flux density of 8.0
T on the bulk surface and 6.5
T over the vacuum chamber surface of the refrigerator, when a 60
mm∅ Gd–Ba–Cu–O bulk superconductor reinforced with a 5
mm thick stainless steel ring was magnetized by field cooling in 8.5
T to 27
K. We have confirmed that the bulk magnet system coupled with a battery is quite portable and can be delivered to any location by using a car with an electric power outlet in the cabin. We have constructed a magnetron sputtering device that employs a bulk magnet system delivered from the place of magnetization by this method. This sputtering device exhibits several unique features such as deposition at a very low Ar gas pressure because the magnetic field is 20 times stronger than that obtained by a conventional device in the working space. |
---|---|
Bibliography: | SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 |
ISSN: | 0921-4534 1873-2143 |
DOI: | 10.1016/j.physc.2005.01.048 |