Low-Temperature Solution-Processed ZnSnO Ozone Gas Sensors Using UV-Assisted Thermal Annealing

• Published in: Journal of the Electrochemical Society Vol. 169; no. 11; pp. 117505 - 117510
• Main Authors: Lin, Yan-Fong, Jiang, You-Yi, Huang, Bo-Lin, Huang, Po-Yen, Hsueh, Wen-Jeng, Huang, Chun-Ying
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.11.2022

Ultraviolet-assisted thermal annealing (UVTA) has been widely used to fabricate solution-processed amorphous oxide semiconductor (AOS)-based transistors and photodetectors. However, this method has not been used for AOS-based gas sensors, even though AOS is a good gas sensing material. This study de...