Project of Ceramic Pressure Transducer with Thick Film

The Aim of this work is to develop a pressure transducer using conductive silver-palladium paste (AgPd), providing a cost reduction in the final product. It was developed a pressure sensor on alumina substrate with conductive tracks of silver-palladium (AgPd) and ruthenium oxide (RuO2) as sensor ele...

Full description

Saved in:
Bibliographic Details
Published inRevista IEEE América Latina Vol. 19; no. 3; pp. 430 - 436
Main Authors Correa, Osvaldo, Martins de Oliveira, Jose, Bonventi, Waldemar, Aranha, Norberto
Format Journal Article
LanguageEnglish
Published Los Alamitos IEEE 01.03.2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
alumina substrate
Aluminum oxide
Ceramics
Laser modes
Palladium
pressure sensor
Pressure sensors
Pressure transducers
Resistors
Ruthenium oxide
Sensors
Substrates
Thick films
Thin films
think film
Transducers
Online AccessGet full text

Cover

More Information
Summary:The Aim of this work is to develop a pressure transducer using conductive silver-palladium paste (AgPd), providing a cost reduction in the final product. It was developed a pressure sensor on alumina substrate with conductive tracks of silver-palladium (AgPd) and ruthenium oxide (RuO2) as sensor elements and piezo resistors, using thick film technology. TheAgPd paste sensor withstood over 10 million cycles at 1Hz without any damage. The developed transducer presented linear response in all working pressure range, even under different temperatures. The results obtained in this project using thick film are interesting for small industries due the low cost of the final product compare with thin films technic.
ISSN:1548-0992
1548-0992
DOI:10.1109/TLA.2021.9447692