A novel inductive angular displacement sensor based on time-grating

• Published in: Measurement science & technology Vol. 33; no. 5; p. 55105
• Main Authors: Sun, Shizheng, Lv, Ze, Han, Yu, He, Zeyin, Zhang, Junming
• Format: Journal Article
• Language: English
• Published: 01.05.2022
• ISSN: 0957-0233; 1361-6501
• DOI: 10.1088/1361-6501/ac4c68

Abstract The paper proposes a novel inductive angular displacement sensor to measure large-diameter hollow rotating mechanical components in large science facilities. The sensor design includes a stator, a rotor with two layers of windings. The stator is fabricated according to the dimension of the rotor, which is the large-diameter hollow rotary mechanical components. Based on the principle of electromagnetic induction, the theoretical model of the proposed sensor is acquired by mathematical equations in detail. The proposed sensor design ensures integration of the large-diameter hollow rotating mechanical components with the stator, and solves the problem that the sensors cannot be coaxially installed in the closed-loop control process of large mechanical rotating parts. The performance of the sensor is evaluated by tests of the prototype sensor fabricated by printed circuit board technology, which manifests the effectiveness of the proposed sensor. The results demonstrate the value of original dynamic relative error is ±97.6″ over 0°–360° range, and the measurement error mainly includes first-order and second-order harmonic components. Therefore, the original errors are reduced by optimizing the angular displacement algorithm of the sensor, optimized results demonstrate the final relative accuracy of the sensor is ±3.5″ over the 0°–360° measurement range.