Charged precipitate scattering of electrons in silicon
The mobilities of electrons have been measured from 15 K to 300 K on CZ-silicon crystals, which are initially P-type and then transformed into N-type after being heat-treated at 670 and 720 degree C, respectively. It has been found that the mobilities of electrons depend on the heat-treatment regime...
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Published in | Physica scripta Vol. 37; no. 5; pp. 800 - 802 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Stockholm
IOP Publishing
01.05.1988
Royal Swedish Academy of Sciences |
Subjects | |
Online Access | Get full text |
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Summary: | The mobilities of electrons have been measured from 15 K to 300 K on CZ-silicon crystals, which are initially P-type and then transformed into N-type after being heat-treated at 670 and 720 degree C, respectively. It has been found that the mobilities of electrons depend on the heat-treatment regime in a complicated manner provided the ionized impurity scattering is predominant. Based upon the model of new donors proposed, a new scattering process caused by charged precipitate is assumed. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1402-4896 0031-8949 1402-4896 |
DOI: | 10.1088/0031-8949/37/5/025 |