Time-resolved electrostatic force microscopy under base-bias-level control

Abstract We propose a base-bias-level control method, in which the contact potential difference is always compensated in a similar way to Kelvin probe force microscopy, applicable to time-resolved electrostatic force microscopy using the pump–probe method. We experimentally acquired temporal wavefor...

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Bibliographic Details
Published inMeasurement science & technology Vol. 35; no. 3; p. 35005
Main Authors Sato, Jo, Ishibashi, Ryota, Takahashi, Takuji
Format Journal Article
LanguageEnglish
Published 01.03.2024
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Summary:Abstract We propose a base-bias-level control method, in which the contact potential difference is always compensated in a similar way to Kelvin probe force microscopy, applicable to time-resolved electrostatic force microscopy using the pump–probe method. We experimentally acquired temporal waveforms of the electrostatic force signal on two SiO 2 / n -type Si samples, one of which was as-grown and the other was treated by forming gas annealing. Consequently, the effectiveness of the proposed method was confirmed.
ISSN:0957-0233
1361-6501
DOI:10.1088/1361-6501/ad10e0