Study of Si-Implanted and Thermally Annealed Layers of Silicon by Using X-ray Grazing Incidence Methods

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Bibliographic Details
Published inActa physica Polonica, A Vol. 101; no. 5; pp. 795 - 801
Main Authors Klinger, D., Lefeld-Sosnowska, M., Pełka, J.B., Paszkowicz, W., Gierłowski, P., Pankowski, P.
Format Journal Article
LanguageEnglish
Published 01.05.2002
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ISSN:0587-4246
1898-794X
DOI:10.12693/APhysPolA.101.795