Microwave Conductivity Investigations of AZO Films Deposited by Atomic Layer Deposition Method at a Low Temperature
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Published in | Acta physica Polonica, A Vol. 134; no. 2; pp. 601 - 604 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.08.2018
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Online Access | Get full text |
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ISSN: | 1898-794X 0587-4246 |
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DOI: | 10.12693/APhysPolA.134.601 |