Detection of particles in the ion beam

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Published inMRS advances Vol. 7; no. 36; pp. 1509 - 1514
Main Authors Matsushita, Hiroshi, Hirose, Sayumi, Yagita, Takanori, Morita, Takao
Format Journal Article
LanguageEnglish
Published 01.12.2022
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Author Matsushita, Hiroshi
Yagita, Takanori
Hirose, Sayumi
Morita, Takao
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  fullname: Yagita, Takanori
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References 394_CR3
DA Brown (394_CR2) 1991; A9
P Sferlazzo (394_CR1) 1992; 92
394_CR4
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  start-page: 565
  year: 1992
  ident: 394_CR1
  publication-title: Ion Implant. Technol.
  contributor:
    fullname: P Sferlazzo
– ident: 394_CR3
– volume: A9
  start-page: 2808
  issue: 5
  year: 1991
  ident: 394_CR2
  publication-title: J. Vac. Sci. Technol.
  doi: 10.1116/1.577205
  contributor:
    fullname: DA Brown
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  doi: 10.1109/IIT.2014.6940043
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Title Detection of particles in the ion beam
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