Detection of particles in the ion beam

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Bibliographic Details
Published inMRS advances Vol. 7; no. 36; pp. 1509 - 1514
Main Authors Matsushita, Hiroshi, Hirose, Sayumi, Yagita, Takanori, Morita, Takao
Format Journal Article
LanguageEnglish
Published 01.12.2022
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ISSN:2059-8521
2059-8521
DOI:10.1557/s43580-022-00394-0