Water Vapor Solubility and Permeability of Coating Polymers and Their Effects on Residual Current of Modified Semiconductor Devices

The residual current values are presented for a modified semiconductor device covered with various polymers at relative humidities of 0-75% at 25°C. Diffusion coefficients Dw, of water vapor in coating polymers, such as silicone, polyimide and thermoplastic polymer, were determined from the values o...

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Published inKOBUNSHI RONBUNSHU Vol. 43; no. 9; pp. 597 - 602
Main Authors YOKOYAMA, Takashi, KINJO, Noriyuki, WAKASHIMA, Yoshiaki
Format Journal Article
LanguageJapanese
Published The Society of Polymer Science, Japan 01.01.1986
Subjects
Coating Polymer
Diffusion Coefficient
Permeability
Residual Current
Solubility
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Summary:The residual current values are presented for a modified semiconductor device covered with various polymers at relative humidities of 0-75% at 25°C. Diffusion coefficients Dw, of water vapor in coating polymers, such as silicone, polyimide and thermoplastic polymer, were determined from the values of the solubility and permeability coefficients. An empirical equation is derived expressing residual current Ir as a function of charging time t, diffusion coefficient D of the charge and relative humidity (%) Pr in the atmosphere: log Ir=mPx+nlogDt+logC where m, n and C are coefficients. Mechanisms explaining variations of residual current are discussed using diffusion coefficient values.
ISSN:0386-2186
1881-5685
DOI:10.1295/koron.43.597