Low-Damage Indium Tin Oxide Formation on Organic Layers Using Unique Cylindrical Sputtering Module and Application in Transparent Organic Light-Emitting Diodes

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 45; no. 2L; p. L213
Main Authors Yamamoto, Hidetoshi, Oyamada, Takahito, Hale, William, Aoshima, Shoichi, Sasabe, Hiroyuki, Adachi, Chihaya
Format Journal Article
LanguageEnglish
Published 01.02.2006
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.45.L213