Resistivity Correction Factor for the Four-Probe Method: Experiment II

Experimental verification of the theoretically derived resistivity correction factor F is presented. Factor F can be applied to a system consisting of a disk sample and a four-probe array. Measurements are made on isotropic graphite disks and crystalline ITO films. Factor F can correct the apparent...

Full description

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 28; no. 5R; p. 949
Main Authors Yamashita, Masato, Yamaguchi, Shoji, Nishii, Toshifumi, Kurihara, Hiroshi, Enjoji, Hideo
Format Journal Article
LanguageEnglish
Published 01.05.1989
Online AccessGet full text

Cover

More Information
Summary:Experimental verification of the theoretically derived resistivity correction factor F is presented. Factor F can be applied to a system consisting of a disk sample and a four-probe array. Measurements are made on isotropic graphite disks and crystalline ITO films. Factor F can correct the apparent variations of the data and lead to reasonable resistivities and sheet resistances. Here factor F is compared to other correction factors; i.e. F ASTM and F JIS .
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.28.949