Highly efficient high-power continuous extreme ultraviolet source for irradiating samples with a large total area

An original arc-discharge source of cw extreme ultraviolet (10–75 nm) radiation is described, which provides an output power level of ∼10 kW at an efficiency of ∼10% (at least, in the 30–70 nm range). The source is simple to manufacture, possesses a working life of ∼1000 h, and is capable of irradia...

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Bibliographic Details
Published inTechnical physics letters Vol. 35; no. 3; pp. 228 - 230
Main Author Donin, V. I.
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.03.2009
Subjects
Classical and Continuum Physics
Physics
Physics and Astronomy
52.25.Os
52.25.Jm
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Summary:An original arc-discharge source of cw extreme ultraviolet (10–75 nm) radiation is described, which provides an output power level of ∼10 kW at an efficiency of ∼10% (at least, in the 30–70 nm range). The source is simple to manufacture, possesses a working life of ∼1000 h, and is capable of irradiating samples with a total exposed area of 0.1–1 m 2 .
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785009030109