A multibeam radio-frequency ion source with a discharge chamber inside a resonator

The design of a multibeam ion source with a discharge chamber inside a half-wavelength radio-frequency (RF) resonator with a spiral load is described. The resonator is excited by a loop insulated from the body of the resonator. The RF oscillator operating at a frequency of 38 MHz is grounded. The us...

Full description

Saved in:
Bibliographic Details
Published inInstruments and experimental techniques (New York) Vol. 51; no. 5; pp. 740 - 743
Main Authors Bogdanovich, B. Yu, Zubovskii, V. P., Nesterovich, A. V., Pashentsev, V. N., Solov’ev, V. N.
Format Journal Article
LanguageEnglish
Published Dordrecht Springer Netherlands 01.09.2008
Subjects
Electrical Engineering
General Experimental Techniques
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
29.25.Ni
Online AccessGet full text

Cover

More Information
Summary:The design of a multibeam ion source with a discharge chamber inside a half-wavelength radio-frequency (RF) resonator with a spiral load is described. The resonator is excited by a loop insulated from the body of the resonator. The RF oscillator operating at a frequency of 38 MHz is grounded. The use of the resonator facilitates the initiation of a discharge at a low power level. The amplitude-frequency characteristics of the resonator at the operating frequencies of the ion source are presented. The effect of the RF power and the extracting voltage on the ion-beam current has been studied. The experimental results on the ion-beam extraction at a low RF power (<100 W) are presented.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441208050151