High sensitivity to humidity of an element based on a carbon-nanotube bundle

The results of development and studies of humidity-sensitive elements based on a carbon-nanotube bundle are presented. It has been demonstrated that arrays of nanotubes grown by the low-temperature plasma-chemical method on planar silicon structures have exceptional sensitivity to humidity. The rati...

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Published inTechnical physics letters Vol. 39; no. 10; pp. 887 - 889
Main Authors Bulyarskii, S. V., Basaev, A. S., Gal’perin, A. V., Ermakov, M. S., Pavlov, A. A., Shaman, Yu. P.
Format Journal Article
LanguageEnglish
Published Boston Springer US 01.10.2013
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Summary:The results of development and studies of humidity-sensitive elements based on a carbon-nanotube bundle are presented. It has been demonstrated that arrays of nanotubes grown by the low-temperature plasma-chemical method on planar silicon structures have exceptional sensitivity to humidity. The ratio of the structure resistance in dry and humid states is more than 10 5 -fold. Such a high relative resistance change is caused by the character of changes in conductivity of the charge carriers between individual tubes of the bundle upon adsorption of water molecules.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785013100143