Growth of Spherical Carbon Particles in the Vertically Excited Columnar Plasma Sheath

We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate t...

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Bibliographic Details
Published inJournal of the Vacuum Society of Japan Vol. 57; no. 4; pp. 155 - 158
Main Authors NAKAYAMA, Taisuke, SUGA, Yuji, NAGATOMO, Kazuki, IKARI, Tomonori, NAITOH, Masamichi, NAGAI, Tatsuzo, SHOJI, Fumiya
Format Journal Article
LanguageJapanese
English
Published The Vacuum Society of Japan 2014
Subjects
Carbon
Elementary particles
Excitation
High resolution
Micrometers
Onions
Plasma sheaths
Transmission electron microscopy
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Summary:We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate temperature and contents of CH4 are near 1066 K and near 18%, respectively. The result of high resolution SEM and high resolution TEM observations strongly suggest the growth of elementary particles of ca. 10 nm which including carbon onions of ca. 2-4 nm in the plasma.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1882-2398
1882-4749
DOI:10.3131/jvsj2.57.155