A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I : Cl2, F2, and HCl

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Bibliographic Details
Published inPlasma chemistry and plasma processing Vol. 12; no. 4; pp. 449 - 476
Main Author MORGAN, W. L
Format Journal Article
LanguageEnglish
Published New York, NY Springer 01.12.1992
Subjects
Atomic and molecular collision processes and interactions
Atomic and molecular physics
Electron scattering
Exact sciences and technology
Physics
Fluorine Chlorides
Review
Experimental study
Cross section (collision)
Fluorine Molecules
Inorganic compound
Low energy
Very low energy
Plasma application
Diatomic molecule
Electron molecule collision
Electron swarm
Chlorine Molecules
Rate constant
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ISSN:0272-4324
1572-8986
DOI:10.1007/bf01447254