Synthesis and processing of thin films in the Tl-Ca-Ba-Cu-O system

• Published in: IEEE transactions on applied superconductivity Vol. 3; no. 1; pp. 1201 - 1204
• Main Authors: Ginley, D.S., Martens, J.S., Venturini, E.L., Tigges, C.P., Ashby, C., Volk, S.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.03.1993; Institute of Electrical and Electronics Engineers
• Subjects: Annealing; Ceramics; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Gold; High-tc films; Laboratories; Magnetic films; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Optical films; Optical materials; Physics; Substrates; Superconducting films and low-dimensional structures; Superconductivity; Temperature; Transistors; Stoichiometry; Annealing; Inorganic compounds; Magnetization; Electric contacts; Transition element compounds; Etching; Experimental study; Precursor; Thin films; Calcium oxides; Thallium oxides; Multi-element compounds; Barium oxides; Sintering; Preparation; High-Tc superconductors; Copper oxides; Hysteresis
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/77.233336

A number of key processing issues have been identified for the film growth and the subsequent processing of thin films in the Tl-Ca-Ba-Cu-O system. The interrelationship between the precursor and the typical ex-situ process schemes is examined. An aqueous photolithographic process technology for submicron device fabrication without significant degradation of the surface resistance and the use of rapid thermal processing for contact anneals are discussed.< >